Article

Applied Physics A

, Volume 101, Issue 2, pp 271-278

First online:

Femtosecond laser drilling of alumina ceramic substrates

  • X. C. WangAffiliated withSingapore Institute of Manufacturing Technology (SIMTech) Email author 
  • , H. Y. ZhengAffiliated withSingapore Institute of Manufacturing Technology (SIMTech)
  • , P. L. ChuAffiliated withSingapore Institute of Manufacturing Technology (SIMTech)
  • , J. L. TanAffiliated withSingapore Institute of Manufacturing Technology (SIMTech)
  • , K. M. TehAffiliated withSingapore Institute of Manufacturing Technology (SIMTech)
  • , T. LiuAffiliated withSingapore Institute of Manufacturing Technology (SIMTech)
  • , Bryden C. Y. AngAffiliated withDSO National Laboratories
  • , G. H. TayAffiliated withDSO National Laboratories

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Abstract

In the paper, the result on femtosecond laser drilling of alumina ceramic substrate was reported. The effects of various laser parameters such as different focus position, traverse speed, drilling pattern, pausing time, etc. on the drilled hole quality in terms of surface finish, heat affected zone (HAZ), hole circularity, debris, microcracks were studied. The quality of laser-drilled holes on alumina ceramic substrates was evaluated with optical microscope, SEM/EDX, and X-ray μ-CT analysis. The optimum drilling conditions were identified. High-quality laser-drilled holes on alumina ceramic substrates were demonstrated. The developed process has potential application in manufacturing of alumina substrate based electronic devices.