Applied Physics A

, Volume 100, Issue 1, pp 181–191

Large-format fabrication by two-photon polymerization in SU-8

Authors

    • Department of PhysicsPurdue University
  • David D. Nolte
    • Department of PhysicsPurdue University
  • Laura J. Pyrak-Nolte
    • Department of PhysicsPurdue University
    • Department of Earth and Atmospheric SciencesPurdue University
Article

DOI: 10.1007/s00339-010-5735-8

Cite this article as:
Liu, Y., Nolte, D.D. & Pyrak-Nolte, L.J. Appl. Phys. A (2010) 100: 181. doi:10.1007/s00339-010-5735-8

Abstract

Microporous structures are central to many fields of science and engineering, but many of these systems are complex with little or no symmetry and are difficult to fabricate. We applied two-photon polymerization (2PP) and femtosecond laser direct-writing techniques to fabricate broad-area large-format 3D microporous structures (450 μm × 450 μm × 40 μm) in the epoxy-based photoresist SU-8. The appropriate exposure was determined by controlling average pulse energies and stage speeds to generate the exposure curves. Mechanical distortion exhibited in suspended walls fabricated by 2PP laser writing was studied by controlling wall lengths and widths. A simple thermal-expansion model is presented to explain the distortion caused by axial loadings of the walls.

Copyright information

© Springer-Verlag 2010