Applied Physics A

, Volume 100, Issue 1, pp 181-191

First online:

Large-format fabrication by two-photon polymerization in SU-8

  • Yihong LiuAffiliated withDepartment of Physics, Purdue University Email author 
  • , David D. NolteAffiliated withDepartment of Physics, Purdue University
  • , Laura J. Pyrak-NolteAffiliated withDepartment of Physics, Purdue UniversityDepartment of Earth and Atmospheric Sciences, Purdue University

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Microporous structures are central to many fields of science and engineering, but many of these systems are complex with little or no symmetry and are difficult to fabricate. We applied two-photon polymerization (2PP) and femtosecond laser direct-writing techniques to fabricate broad-area large-format 3D microporous structures (450 μm × 450 μm × 40 μm) in the epoxy-based photoresist SU-8. The appropriate exposure was determined by controlling average pulse energies and stage speeds to generate the exposure curves. Mechanical distortion exhibited in suspended walls fabricated by 2PP laser writing was studied by controlling wall lengths and widths. A simple thermal-expansion model is presented to explain the distortion caused by axial loadings of the walls.