Applied Physics A

, 97:751

Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

  • C. H. Lin
  • L. Jiang
  • Y. H. Chai
  • H. Xiao
  • S. J. Chen
  • H. L. Tsai
Article

DOI: 10.1007/s00339-009-5350-8

Cite this article as:
Lin, C.H., Jiang, L., Chai, Y.H. et al. Appl. Phys. A (2009) 97: 751. doi:10.1007/s00339-009-5350-8

Abstract

This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.

PACS

42.62.-b81.05.Kf82.50.Pt

Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • C. H. Lin
    • 1
    • 2
  • L. Jiang
    • 3
  • Y. H. Chai
    • 4
  • H. Xiao
    • 5
  • S. J. Chen
    • 1
  • H. L. Tsai
    • 2
  1. 1.Department of Engineering ScienceNational Cheng Kung UniversityTainanTaiwan
  2. 2.Department of Mechanical & Aerospace EngineeringMissouri University of Science and TechnologyRollaUSA
  3. 3.Department of Mechanical and Automation EngineeringBeijing Institute of TechnologyBeijingChina
  4. 4.Department of Electrical EngineeringTechnology and Science Institute of Northern TaiwanTaipeiTaiwan
  5. 5.Department of Electrical & Computer EngineeringMissouri University of Science and TechnologyRollaUSA