Applied Physics A

, Volume 95, Issue 4, pp 967–972

Heterogeneous integration of InGaAsP microdisk laser on a silicon platform using optofluidic assembly

  • Ming-Chun Tien
  • Aaron T. Ohta
  • Kyoungsik Yu
  • Steven L. Neale
  • Ming C. Wu
Open AccessArticle

DOI: 10.1007/s00339-009-5125-2

Cite this article as:
Tien, MC., Ohta, A.T., Yu, K. et al. Appl. Phys. A (2009) 95: 967. doi:10.1007/s00339-009-5125-2

Abstract

Heterogeneous integration of InGaAsP microdisk lasers on a silicon platform is demonstrated experimentally using an optofluidic assembly technique. The 200-nm-thick, 5- and 10-μm-diameter microdisk lasers are fabricated on InP and then released from the substrates. They are reassembled on a silicon platform using lateral-field optoelectronic tweezers (LOET). The assembled laser with 5-μm diameter exhibits a threshold pump power of 340 μW at room temperature under pulse condition. The heterogeneously-integrated InGaAsP-on-Si microdisk laser could provide the much needed optical source for CMOS-based silicon photonics. The small footprint and low power consumption make them attractive for optical interconnect applications. The optofluidic assembly technique enables efficient use of the III–V epitaxial materials in silicon photonic integrated circuits.

PACS

42.55.Sa42.82.Fv47.61.Fg
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Copyright information

© The Author(s) 2009

Authors and Affiliations

  • Ming-Chun Tien
    • 1
  • Aaron T. Ohta
    • 1
  • Kyoungsik Yu
    • 1
  • Steven L. Neale
    • 1
  • Ming C. Wu
    • 1
  1. 1.Department of Electrical Engineering and Computer SciencesUniversity of CaliforniaBerkeleyUSA