Applied Physics A

, Volume 93, Issue 4, pp 857–861

Laser processing of sapphire by strongly focused femtosecond pulses

Article

DOI: 10.1007/s00339-008-4763-0

Cite this article as:
Juodkazis, S. & Misawa, H. Appl. Phys. A (2008) 93: 857. doi:10.1007/s00339-008-4763-0

Abstract

The high-temperature annealing (1500°C for 15 min) of the shock-amorphized and compressed sapphire around the voids rendered the amorphous sapphire insoluble in aqueous solution of hydrofluoric acid. There were no observable back relaxation and reflow of the compressed amorphous phase. The overlapping of femtosecond pulses by >70% of the focal diameter also made the photomodified regions insoluble in aqueous solution of hydrofluoric acid. Femtosecond laser cutting of hard dielectric materials is discussed.

PACS

81.07.-b 47.40.Nm 62.50.+p 81.40.-z 

Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  1. 1.Research Institute for Electronic ScienceHokkaido UniversitySapporoJapan

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