Applied Physics A

, Volume 93, Issue 2, pp 447–452

Fast solvent-driven micropump fabricated by two-photon microfabrication

Authors

  • Zhong Xiong
    • Laboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and ChemistryChinese Academy of Sciences
    • Graduate School of the Chinese Academy of Sciences
  • Xian-Zi Dong
    • Laboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and ChemistryChinese Academy of Sciences
  • Wei-Qiang Chen
    • Laboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and ChemistryChinese Academy of Sciences
    • Laboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and ChemistryChinese Academy of Sciences
Invited rapid communication

DOI: 10.1007/s00339-008-4735-4

Cite this article as:
Xiong, Z., Dong, X., Chen, W. et al. Appl. Phys. A (2008) 93: 447. doi:10.1007/s00339-008-4735-4

Abstract

A solvent-driven micropump was developed using three-dimensional two-photon microfabrication. The actuation of micropump is utilizing the bending behavior of hydrogel film under asymmetric solvent-stimulus. The micropump could absorb and discharge fluid reversibly by simply alternating solvent composition. Contributing to the thin hydrogel film with the thickness of 2.5 μm, the response time was significantly improved to 0.17 s. The discharge capacity of fluid was estimated to be as low as 9.2×10−2 pL. The pumping of such ultra-low-volume fluid will be useful for further miniaturization of micro-nanofluidic devices.

PACS

82.50.Pt82.35.Jk81.40.-z82.33.Ln83.50.Uv

Copyright information

© Springer-Verlag 2008