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Applied Physics A

, Volume 93, Issue 2, pp 447-452

First online:

Fast solvent-driven micropump fabricated by two-photon microfabrication

  • Zhong XiongAffiliated withLaboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of SciencesGraduate School of the Chinese Academy of Sciences
  • , Xian-Zi DongAffiliated withLaboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences
  • , Wei-Qiang ChenAffiliated withLaboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences
  • , Xuan-Ming DuanAffiliated withLaboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences Email author 

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Abstract

A solvent-driven micropump was developed using three-dimensional two-photon microfabrication. The actuation of micropump is utilizing the bending behavior of hydrogel film under asymmetric solvent-stimulus. The micropump could absorb and discharge fluid reversibly by simply alternating solvent composition. Contributing to the thin hydrogel film with the thickness of 2.5 μm, the response time was significantly improved to 0.17 s. The discharge capacity of fluid was estimated to be as low as 9.2×10−2 pL. The pumping of such ultra-low-volume fluid will be useful for further miniaturization of micro-nanofluidic devices.

PACS

82.50.Pt 82.35.Jk 81.40.-z 82.33.Ln 83.50.Uv