Applied Physics A

, Volume 93, Issue 1, pp 33–37

Single laser exposure fabrication of diamond-like 3-dimensional photonic crystal microstructures using circularly polarized light

  • Debashis Chanda
  • Ladan E. Abolghasemi
  • Peter R. Herman
Article

DOI: 10.1007/s00339-008-4679-8

Cite this article as:
Chanda, D., Abolghasemi, L.E. & Herman, P.R. Appl. Phys. A (2008) 93: 33. doi:10.1007/s00339-008-4679-8

Abstract

Phase tunable multi-level diffractive optical elements define an attractive approach for single laser exposure fabrication of 3-dimensional photonic crystal microstructures. The significant advantage of these multi-level diffractive optical elements over two-level diffractive optical elements is the flexibility of fabricating a wide range of 3-dimensional periodic structures by manipulating the relative phase of different diffracted beams. Here, phase tuning was applied to demonstrate fabrication of a hybrid 3-dimensional structure intermediate between previously reported diamond-like Woodpile-type structure of tetragonal symmetry and structure having body-centered-tetragonal lattice symmetry. Circularly polarized light was applied for the first time to balance the diffraction order efficiencies and improve the structural uniformity. Design guidelines are presented for generating diamond-like photonic crystal template that possesses complete photonic bandgap when inverted with high refractive index materials.

PACS

42.70.Qs 42.40.Eq 42.25.Fx 42.25.Hz 

Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  • Debashis Chanda
    • 1
  • Ladan E. Abolghasemi
    • 1
  • Peter R. Herman
    • 1
  1. 1.Department of Electrical and Computer EngineeringInstitute for Optical Sciences, University of TorontoTorontoCanada

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