Applied Physics A

, Volume 86, Issue 4, pp 491–495

Formation mechanisms of uniform arrays of periodic nanoparticles and nanoripples on 6H-SiC crystal surface induced by femtosecond laser ablation

  • X.J. Wu
  • T.Q. Jia
  • F.L. Zhao
  • M. Huang
  • N.S. Xu
  • H. Kuroda
  • Z.Z. Xu
Article

DOI: 10.1007/s00339-006-3797-4

Cite this article as:
Wu, X., Jia, T., Zhao, F. et al. Appl. Phys. A (2007) 86: 491. doi:10.1007/s00339-006-3797-4

Abstract

Uniform arrays of periodic nanoparticles with 80-nm period are formed on 6H-SiC crystal irradiated by circularly polarized 400-nm femtosecond laser pulses. In order to understand the formation mechanism, the morphology evolvement as a function of laser pulse energy and number is studied. Periodic nanoripples are also formed on the sample surface irradiated by linearly polarized 400-, 510- and 800-nm femtosecond laser pulses. All these results support well the mechanism that second-harmonic generation plays an important role in the formation of periodic nanostructures.

Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  • X.J. Wu
    • 1
  • T.Q. Jia
    • 1
    • 2
  • F.L. Zhao
    • 1
  • M. Huang
    • 1
  • N.S. Xu
    • 1
  • H. Kuroda
    • 2
  • Z.Z. Xu
    • 3
  1. 1.State Key Laboratory of Optoelectronic Materials and TechnologiesZhongshan (Sun Yat-sen) UniversityGuangzhouP.R. China
  2. 2.The Institute for Solid State PhysicsUniversity of TokyoChibaJapan
  3. 3.State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine MechanicsChinese Academy of ScienceShanghaiP.R. China