Laser-induced nanopatterning of silicon with colloidal monolayers
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- Brodoceanu, D., Landström, L. & Bäuerle, D. Appl. Phys. A (2007) 86: 313. doi:10.1007/s00339-006-3781-z
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A regular lattice of amorphous silica microspheres is used as a microlens system for laser-induced single-step fabrication of arrays of nanoholes on a (100) Si surface. With single-pulse 265.7-nm femtosecond-laser radiation, hole diameters of 57±6.5 nm at full width at half maximum and depths of 6±1 nm have been achieved.