Applied Physics A

, Volume 86, Issue 3, pp 313–314

Laser-induced nanopatterning of silicon with colloidal monolayers

Rapid communication

DOI: 10.1007/s00339-006-3781-z

Cite this article as:
Brodoceanu, D., Landström, L. & Bäuerle, D. Appl. Phys. A (2007) 86: 313. doi:10.1007/s00339-006-3781-z


A regular lattice of amorphous silica microspheres is used as a microlens system for laser-induced single-step fabrication of arrays of nanoholes on a (100) Si surface. With single-pulse 265.7-nm femtosecond-laser radiation, hole diameters of 57±6.5 nm at full width at half maximum and depths of 6±1 nm have been achieved.

Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  1. 1.Institut für Angewandte PhysikJohannes-Kepler-Universität LinzLinzAustria
  2. 2.Russell S. Springer ChairUniversity of CaliforniaBerkeleyUSA