Applied Physics A

, Volume 85, Issue 1, pp 11–14

Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

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DOI: 10.1007/s00339-006-3672-3

Cite this article as:
Cheng, Y., Tsai, H., Sugioka, K. et al. Appl. Phys. A (2006) 85: 11. doi:10.1007/s00339-006-3672-3


We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications.

Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  • Y. Cheng
    • 1
  • H.L. Tsai
    • 1
  • K. Sugioka
    • 2
  • K. Midorikawa
    • 2
  1. 1.Laser-Based Manufacturing Laboratory, Department of Mechanical & Aerospace EngineeringUniversity of Missouri-RollaRollaUSA
  2. 2.Laser Technology LaboratoryRIKEN – The Institute of Physical and Chemical ResearchSaitamaJapan