Applied Physics A

, Volume 84, Issue 4, pp 423–430

The characteristics of laser micro drilling using a Bessel beam

Authors

    • National Institute of Advanced Industrial Science and Technology (AIST)
  • Y. Kizuka
    • National Institute of Advanced Industrial Science and Technology (AIST)
  • T. Inoue
    • National Institute of Advanced Industrial Science and Technology (AIST)
Article

DOI: 10.1007/s00339-006-3629-6

Cite this article as:
Matsuoka, Y., Kizuka, Y. & Inoue, T. Appl. Phys. A (2006) 84: 423. doi:10.1007/s00339-006-3629-6

Abstract

A Bessel beam is suitable for laser micro-fabrication because it possesses both a micron-sized focal spot and a deep focal depth. As the influence of focusing aberrations is much smaller than that of a convex lens, the generation of a Bessel beam using an axicon is very practical. In the case of laser micro drilling of austenitic stainless steel with a Bessel beam, suitable processing conditions were investigated. The threshold fluence to make a through hole increased with an increase in the sample thickness. For samples with the same thickness, the threshold fluence increased with an increase in the crossing angle. A small crossing angle Bessel beam can drill a deep hole with a small threshold fluence. A through hole with a diameter smaller than 10 μm can be made on a stainless steel sheet 20 μm thick by using a Bessel beam with a large crossing angle. The taper of the hole drilled with the Bessel beam is smaller than that with the focused beam from the convex lens.

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© Springer-Verlag 2006