Applied Physics A

, Volume 83, Issue 1, pp 27–29

Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses


DOI: 10.1007/s00339-005-3456-1

Cite this article as:
An, R., Li, Y., Dou, Y. et al. Appl. Phys. A (2006) 83: 27. doi:10.1007/s00339-005-3456-1


Microfluidic chambers embedded in silica glass are drilled by water-assisted ablation with a femtosecond laser. The continuous scanning ablation increases the processing speed up to 50 μm/s. Not only may microchambers or microtrenches be obtained at high speed and in one step, but also combined structures consisting of cascaded microchambers and microtrenches may be fabricated. The inner-wall morphology of the microchambers is analyzed by a scanning electron microscope.

Copyright information

© Springer-Verlag 2005

Authors and Affiliations

  • R. An
    • 1
  • Y. Li
    • 1
  • Y. Dou
    • 1
  • D. Liu
    • 1
  • H. Yang
    • 1
  • Q. Gong
    • 1
  1. 1.State Key Laboratory for Mesoscopic Physics and Department of PhysicsPeking UniversityBeijingP.R. China