, Volume 83, Issue 1, pp 27-29
Date: 18 Jan 2006

Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses

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Microfluidic chambers embedded in silica glass are drilled by water-assisted ablation with a femtosecond laser. The continuous scanning ablation increases the processing speed up to 50 μm/s. Not only may microchambers or microtrenches be obtained at high speed and in one step, but also combined structures consisting of cascaded microchambers and microtrenches may be fabricated. The inner-wall morphology of the microchambers is analyzed by a scanning electron microscope.


87.80.Mj; 52.38.Mf; 82.50.Pt; 42.62.-b; 42.70.Ce