Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses
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- An, R., Li, Y., Dou, Y. et al. Appl. Phys. A (2006) 83: 27. doi:10.1007/s00339-005-3456-1
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Microfluidic chambers embedded in silica glass are drilled by water-assisted ablation with a femtosecond laser. The continuous scanning ablation increases the processing speed up to 50 μm/s. Not only may microchambers or microtrenches be obtained at high speed and in one step, but also combined structures consisting of cascaded microchambers and microtrenches may be fabricated. The inner-wall morphology of the microchambers is analyzed by a scanning electron microscope.