Applied Physics A

, 82:523

Method for reducing debris and thermal destruction in femtosecond laser processing by applying transparent coating

Article

DOI: 10.1007/s00339-005-3422-y

Cite this article as:
Kawamura, D., Takita, A., Hayasaki, Y. et al. Appl. Phys. A (2006) 82: 523. doi:10.1007/s00339-005-3422-y

Abstract

A cavity processed by a tightly focused femtosecond laser pulse is surrounded by a ring-shaped protrusion, debris, and small droplets. In order to reduce these undesired damages, we propose processing with a coating of transparent material on a target material. PMMA (poly-methyl methacrylate) with the thickness that its surface is not ablated by a single pulse irradiation reduces dissolution and vaporization caused by the interaction between a high-density hot vapor plume and the target material. Furthermore, the material at the target surface does not escape freely due to the coating layer. As a result, a submicrometer-sized cavity is produced with a reduction of debris and a smaller thermal-destruction area.

Copyright information

© Springer-Verlag 2005

Authors and Affiliations

  • D. Kawamura
    • 1
  • A. Takita
    • 1
  • Y. Hayasaki
    • 1
  • N. Nishida
    • 1
  1. 1.Department of Optical Science and Technology, Faculty of EngineeringThe University of TokushimaTokushimaJapan

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