Maskless nonlinear lithography with femtosecond laser pulses
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- Koch, J., Fadeeva, E., Engelbrecht, M. et al. Appl. Phys. A (2006) 82: 23. doi:10.1007/s00339-005-3418-7
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Development of maskless lithography techniques can provide a potential solution for the photomask cost issue. Furthermore, it could open a market for small-scale manufacturing applications. Since femtosecond lasers have been found suitable for processing of a wide range of materials with sub-micrometer resolution – whereas the limit of achievable structure sizes is predicted to be below 100 nm – it is attractive to use this technique for maskless lithography. In this paper, we present the first results on super-resolution femtosecond laser lithography, which show great potential for future applications.