Applied Physics A

, Volume 80, Issue 4, pp 683–685

Femtosecond laser microfabrication of periodic structures using a microlens array

Rapid communication

DOI: 10.1007/s00339-004-3108-x

Cite this article as:
Matsuo, S., Juodkazis, S. & Misawa, H. Appl. Phys. A (2005) 80: 683. doi:10.1007/s00339-004-3108-x


A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  1. 1.Graduate School of EngineeringThe University of Tokushima and JST-CRESTTokushimaJapan
  2. 2.Research Institute of Electronic ScienceHokkaido University and JST-CRESTSapporoJapan