Femtosecond laser microfabrication of periodic structures using a microlens array
- First Online:
- Cite this article as:
- Matsuo, S., Juodkazis, S. & Misawa, H. Appl. Phys. A (2005) 80: 683. doi:10.1007/s00339-004-3108-x
- 378 Downloads
A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.