Femtosecond laser microfabrication of periodic structures using a microlens array
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- Matsuo, S., Juodkazis, S. & Misawa, H. Appl. Phys. A (2005) 80: 683. doi:10.1007/s00339-004-3108-x
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A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.