Development of practical system for laser-induced plasma-assisted ablation (LIPAA) for micromachining of glass materials
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- Hanada, Y., Sugioka, K., Gomi, Y. et al. Appl. Phys. A (2004) 79: 1001. doi:10.1007/s00339-004-2614-1
The laser-induced plasma-assisted ablation (LIPAA) process developed by us, in which only a single conventional pulsed laser is used, makes it possible to perform high-quality and high-speed glass microfabrication. We developed the LIPAA system, which uses the second harmonic of a diode pumped Q-switched Nd:YAG laser, for practical use in industry. The system comprises two optical components, which are the objective lens for high-resolution microfabrication and the galvano mirror type scanner for high-speed patterning of complicated microstructures. In addition to surface microstructuring of the glass, selective metallization of the glass by the LIPAA process, followed by electroless Cu plating, is demonstrated .