Applied Physics A

, Volume 79, Issue 4, pp 1001–1003

Development of practical system for laser-induced plasma-assisted ablation (LIPAA) for micromachining of glass materials

  • Y. Hanada
  • K. Sugioka
  • Y. Gomi
  • H. Yamaoka
  • O. Otsuki
  • I. Miyamoto
  • K. Midorikawa
Article

DOI: 10.1007/s00339-004-2614-1

Cite this article as:
Hanada, Y., Sugioka, K., Gomi, Y. et al. Appl. Phys. A (2004) 79: 1001. doi:10.1007/s00339-004-2614-1

Abstract

The laser-induced plasma-assisted ablation (LIPAA) process developed by us, in which only a single conventional pulsed laser is used, makes it possible to perform high-quality and high-speed glass microfabrication. We developed the LIPAA system, which uses the second harmonic of a diode pumped Q-switched Nd:YAG laser, for practical use in industry. The system comprises two optical components, which are the objective lens for high-resolution microfabrication and the galvano mirror type scanner for high-speed patterning of complicated microstructures. In addition to surface microstructuring of the glass, selective metallization of the glass by the LIPAA process, followed by electroless Cu plating, is demonstrated .

Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  • Y. Hanada
    • 1
    • 2
  • K. Sugioka
    • 1
    • 2
  • Y. Gomi
    • 3
  • H. Yamaoka
    • 3
  • O. Otsuki
    • 3
  • I. Miyamoto
    • 2
  • K. Midorikawa
    • 1
  1. 1.RIKEN (The Institute of Physical and Chemical Research)SaitamaJapan
  2. 2.Department of Applied Electronics, Faculty of Industrial Science & TechnologyTokyo University of ScienceChibaJapan
  3. 3.MARUBUN CORPORATIONTokyoJapan