Applied Physics A

, Volume 77, Issue 3, pp 371–373

Three-dimensional micro-channels in polymers: one-step fabrication

  • K. Yamasaki
  • S. Juodkazis
  • S. Matsuo
  • H. Misawa
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DOI: 10.1007/s00339-003-2191-8

Cite this article as:
Yamasaki, K., Juodkazis, S., Matsuo, S. et al. Appl Phys A (2003) 77: 371. doi:10.1007/s00339-003-2191-8

Abstract

We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals .

Copyright information

© Springer-Verlag 2003

Authors and Affiliations

  • K. Yamasaki
    • 1
  • S. Juodkazis
    • 1
    • 2
  • S. Matsuo
    • 1
    • 2
  • H. Misawa
    • 1
    • 2
    • 3
  1. 1.Department of Ecosystem EngineeringThe University of TokushimaTokushimaJapan
  2. 2.Core Research for Evolution Science & Technology (CREST)Japan Science & Technology Corporation (JST)Japan
  3. 3.Research Institute for Electronic ScienceHokkaido UniversitySapporoJapan

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