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Applied Physics A

, Volume 76, Issue 6, pp 983-985

First online:

Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC

  • N. YasumaruAffiliated withDepartment of Mechanical Engineering, Fukui National College of Technology, Sabae, Fukui 916-8507, Japan
  • , K. MiyazakiAffiliated withInstitute of Advanced Energy, Kyoto University, Uji, Kyoto 611-0011, Japan
  • , J. KiuchiAffiliated withEyetec Co. Ltd., Sabae, Fukui 916-0016, Japan

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We report observation of nanostructures formed on thin TiN and DLC films that were irradiated by 800- and 267-nm, femtosecond (fs) Ti:sapphire laser pulses at an energy fluence slightly above the ablation threshold. On the ablated thin-film surfaces, the linearly polarized fs pulses produce arrays of fine periodic structures that are almost oriented to the direction perpendicular to the laser polarization, while the circularly polarized light forms fine-dot structures. The size of these surface structures is 1/10–1/5 of the laser wavelength and decreases with a decrease in the laser wavelength.

PACS: 61.80.Ba; 79.20.Ds; 42.62.Cf