3-D microstructuring inside photosensitive glass by femtosecond laser excitation
- Cite this article as:
- Masuda, M., Sugioka, K., Cheng, Y. et al. Appl Phys A (2003) 76: 857. doi:10.1007/s00339-002-1937-z
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We show that a femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties of transparency, hardness and chemical and thermal resistances. The photosensitivity arises from the cerium in the glass. After exposure to a focused laser beam, latent images are written. Modified regions are developed by a post-baking process and then preferentially etched away in a 10% dilute solution of hydrofluoric acid at room temperature. We have measured the critical dose for modification of the photosensitive glass, and fabricated 3-D microstructures with microcells and hollow microchannels embedded in the glass based on the critical dose.