Applied Physics A

, Volume 76, Issue 5, pp 857–860

3-D microstructuring inside photosensitive glass by femtosecond laser excitation

  • M. Masuda
  • K. Sugioka
  • Y. Cheng
  • N. Aoki
  • M. Kawachi
  • K. Shihoyama
  • K. Toyoda
  • H. Helvajian
  • K. Midorikawa
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DOI: 10.1007/s00339-002-1937-z

Cite this article as:
Masuda, M., Sugioka, K., Cheng, Y. et al. Appl Phys A (2003) 76: 857. doi:10.1007/s00339-002-1937-z

Abstract.

We show that a femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties of transparency, hardness and chemical and thermal resistances. The photosensitivity arises from the cerium in the glass. After exposure to a focused laser beam, latent images are written. Modified regions are developed by a post-baking process and then preferentially etched away in a 10% dilute solution of hydrofluoric acid at room temperature. We have measured the critical dose for modification of the photosensitive glass, and fabricated 3-D microstructures with microcells and hollow microchannels embedded in the glass based on the critical dose.

PACS: 42.62.-b; 81.05.Kf; 82.50.Pt

Copyright information

© Springer-Verlag 2002

Authors and Affiliations

  • M. Masuda
    • 1
  • K. Sugioka
    • 1
  • Y. Cheng
    • 1
  • N. Aoki
    • 1
  • M. Kawachi
    • 3
  • K. Shihoyama
    • 3
  • K. Toyoda
    • 2
  • H. Helvajian
    • 4
  • K. Midorikawa
    • 1
  1. 1.RIKEN, The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, JapanJP
  2. 2.Department of Applied Electronics, Tokyo University of Science, Yamazaki 2641, Noda, Chiba 278-8510, JapanJP
  3. 3.HOYA CONTINUUM CORPORATION, Hikawacho 3-5-24, Toda, Saitama 335-0027, JapanJP
  4. 4.Center for Microtechnology, The Aerospace Corporation, Los Angeles, CA 90009-2957, USAUS