Characterization of non-stoichiometric co-sputtered Ba0.6Sr0.4(Ti1 − xFex)1 + xO3 − δ thin films for tunable passive microwave applications
- First Online:
- Cite this article as:
- Stemme, F., Geßwein, H., Drahus, M.D. et al. Anal Bioanal Chem (2012) 403: 643. doi:10.1007/s00216-011-5435-z
The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distribution in the thin films obtained by X-ray photoelectron spectroscopy, Rutherford backscattering spectrometry, and time-of-flight secondary ion mass spectroscopy reveal a homogeneous dopant concentration throughout the thin film. The incorporation of the iron dopant and the temperature-dependent evolution of the crystal structure and morphology are analyzed by electron paramagnetic resonance spectroscopy, X-ray diffraction, Raman spectroscopy, atomic force microscopy, and scanning electron microscopy. In summary, these results emphasize the RF magnetron co-sputter process as a versatile way to fabricate doped thin films.