Journal of Mechanical Science and Technology

, Volume 20, Issue 12, pp 2094–2104

Design of microstereolithography system based on dynamic image projection for fabrication of three-dimensional microstructures

  • Jae Won Choi
  • Young Myoung Ha
  • Seok Hee Lee
  • Kyung Hyun Choi
Article

DOI: 10.1007/BF02916326

Cite this article as:
Choi, J.W., Ha, Y.M., Lee, S.H. et al. J Mech Sci Technol (2006) 20: 2094. doi:10.1007/BF02916326

Abstract

As demands for complex microstructures with high aspect ratios have increased, the existing methods, MEMS and LIGA, have had difficulties coping with the number of masks and fabricable heights. A microstereolithography technology can meet these demands because it has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, 3D part is fabricated by stacking layers, 2D sections, which are sliced from STL file, and the Dynamic Image Projection process enables the resin surface to be cured by a dynamic image generated with DMD™ (Digital Micromirror Device) and one irradiation. In this paper, we address optical design process for implementing this microstereolithography system that takes the light path based on DMD operation and image-formation on the resin surface using an optical design program into consideration. To verify the performance of this implemented microstereolithography system, complex 3D microstructures with high aspect ratios were fabricated.

Key Words

MicrostereolithographyMicrostructuresDigital Micromirror Device (DMD)Curing

Copyright information

© The Korean Society of Mechanical Engineers (KSME) 2006

Authors and Affiliations

  • Jae Won Choi
    • 1
  • Young Myoung Ha
    • 1
  • Seok Hee Lee
    • 2
  • Kyung Hyun Choi
    • 3
  1. 1.Department of Mechanical and Intelligent Systems EngineeringPusan National UniversityBusanKorea
  2. 2.School of Mechanical EngineeringPusan National UniversityBusanKorea
  3. 3.Department of Mechatronics EngineeringCheju National UniversityJeju-doKorea