Journal of Electronic Materials

, Volume 4, Issue 1, pp 119-129

First online:

Multi-layer epitaxially grown silicon impatt diodes at millimeter-wave frequencies

  • C. P. WenAffiliated withRCA Laboratories
  • , Y. S. ChiangAffiliated withRCA Laboratories
  • , E. J. DenlingerAffiliated withRCA Laboratories

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Complementary (N+PP+) and double-drift (N+NPP+) silicon IMPATT diodes were prepared and investigated as oscillators in the millimeter-wave frequency region of 50 to 70 GHz. All the diodes were fabricated from multi-layer epitaxially grown silicon structures. A maximum CW output power level of 198 mW at 62.9 GHz and a maximum conversion efficiency of 7.3% have been measured for the complementary diodes. The double-drift IMPATT diodes have a maximum CW output power of 400 mW at 56.3 GHz and a maximum conversion efficiency of 8.5%.

Key words

Silicon IMPATT diodes Silicon epitaxy mm-wave diodes Microwave semiconductor devices