Plasma Chemistry and Plasma Processing

, Volume 16, Issue 3, pp 379–398

Numerical method and composition in multi-temperature plasmas: Application to an Ar-H2 mixture

  • P. Andre
  • M. Abbaoui
  • A. Lefort
  • M. J. Parizet
Article

DOI: 10.1007/BF01447152

Cite this article as:
Andre, P., Abbaoui, M., Lefort, A. et al. Plasma Chem Plasma Process (1996) 16: 379. doi:10.1007/BF01447152

Abstract

To take into account the nonequilibrium between the temperatures (electronic, rotation, vibration, translation) in plasmas, the partition function are modified. Then they are used to determine the concentration in a Gibbs free energy minimization method adopted to a multi-temperature plasma. Their influence oil the results for different temperature hypotheses is quantified. The composition and thermodynamic properties of an Ar-H2 mixture are given and discussed for different temperature nonequilibria.

Key words

Multi-temperature plasmasAr-H2 mixtureplasma compositionnumerical

Copyright information

© Plenum Publishing Corporation 1996

Authors and Affiliations

  • P. Andre
    • 1
  • M. Abbaoui
    • 1
  • A. Lefort
    • 1
  • M. J. Parizet
    • 1
  1. 1.Laboratoire Arc Electrique et Plasmas Thermiques, URA CNRS 828Université Blaise PascalAubière CedexFrance