Two-dimensional electromagnetic field effects in induction plasma modelling
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Based on the electromagnetic vector potential representation, a two-dimensional, axisymmetric model is proposed for the calculation of the electromageetic fields in an inductively coupled, radiofrequency (r.f.) plasma. A comparative analysis made between the flow, temperature, and electromagnetic fields obtained using this model and those given by our earlier one-dimensional electromagnetic fields model show relatively little difference between the temperature fields predicted by the two models. Significant differences are observed, however, between the corresponding flow and electromagnetic fields. The new model offers an effective means of accounting for variations in the coil geometry on the flow and temperature fields in the discharge and for achieving a better representation of the electromagnetic fields under higher frequency conditions (f>10 MHz).
- J. Mostaghimi, P. Proulx, and M. Boulos,Numer. Heat Transfer 8, 187 (1985).
- J. Mostaghimi, P. Proulx, and M. Boulos,Plasma Chem. Plasma Process. 4, 199 (1984).
- T. Yoshida, K. Nakagawa, T. Harada, and K. Akashi,Plasma Chem. Plasma Process. 1, 113 (1981).
- P. Proulx, J. Mostaghimi, and M. I. Boulos,Int. J. Heat Mass Transfer 28, 1327 (1985).
- P. Proulx, J. Mostaghimi, and M. I. Boulos,Plasma Chem. Plasma Process. 7, 29 (1987).
- J. Mostaghimi, P. Proulx, and M. I. Boulos,Spectrochimica Acta B 40, 153 (1985).
- J. Mostaghimi, P. Proulx, and M. I. Boulos,J. Appl. Phys. 61, 1753 (1987).
- M. I. Boulos,Pure Appl. Chem. 57, 1321 (1985).
- M. I. Boulos and R. M. Barnes, “Plasma Modelling and Computer Simulation,” inInductively Coupled Plasma Emission Spectroscopy, Wiley, New York (1987), Chapter 9, p. 289.
- S. V. Dresvin, ed.,Physics and Technology of Low-Temperature Plasmas, Iowa State University Press, Ames, Iowa (1977), pp. 329–350.
- M. Mitchner and C. H. Kruger, Jr.,Partially Ionized Gases, Wiley, New York (1973).
- J. D. Jackson,Classical Electrodynamics, Wiley, New York (1962); Part II, P. W. J. M. Boumans, ed., Wiley, New York (1987).
- J. W. McKelliget, “A Mathematical Model of an Inductively Coupled Plasma Torch,” University of Lowell, Internal Report, TR86-112.1 (1986).
- J. W. McKelliget and N. El-Kaddah, “Theoretical Prediction of the Effect of Coil Configuration on the Gas Mixing in an Inductively Coupled Plasma,” MRS Symposium on Plasma Processing and Synthesis of Materials, Anaheim, California (1987).
- J. Mostaghimi, “Two-Dimensional Electromagnetic Fields in R.F. Inductively Coupled Plasmas,” University of Sherbrooke, Internal Report (1987).
- G. A. Korn and T. M. Korn,Mathematical Handbook for Scientists and Engineers, 2nd ed., McGraw-Hill, New York (1968).
- J. L. Lewis, “The Motion of Particles Entrained in a Plasma Jet,” Ph.D. Thesis, McGill University (1971).
- D. L. Evans and R. S. Tankin,Phys. Fluids 10, 1137–1144 (1967).
- R. S. Devoto,Phys. Fluids 9, 1230–1240 (1966).
- A. E. Mensing and L. R. Boedecker, NASA Contract Report CR-1312 (1969).
- S. V. Patankar,Computational Fluid Flow and Heat Transfer, McGraw-Hill, New York (1980).
- Two-dimensional electromagnetic field effects in induction plasma modelling
Plasma Chemistry and Plasma Processing
Volume 9, Issue 1 , pp 25-44
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- Kluwer Academic Publishers-Plenum Publishers
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- induction plasmas
- flow and temperature field
- two-dimensional electromagnetic fields
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