Plasma Chemistry and Plasma Processing

, Volume 9, Issue 1, pp 25–44

Two-dimensional electromagnetic field effects in induction plasma modelling

Authors

  • Javad Mostaghimi
    • Department of Chemical EngineeringUniversity of Sherbrooke
  • Maher I. Boulos
    • Department of Chemical EngineeringUniversity of Sherbrooke
Article

DOI: 10.1007/BF01015825

Cite this article as:
Mostaghimi, J. & Boulos, M.I. Plasma Chem Plasma Process (1989) 9: 25. doi:10.1007/BF01015825

Abstract

Based on the electromagnetic vector potential representation, a two-dimensional, axisymmetric model is proposed for the calculation of the electromageetic fields in an inductively coupled, radiofrequency (r.f.) plasma. A comparative analysis made between the flow, temperature, and electromagnetic fields obtained using this model and those given by our earlier one-dimensional electromagnetic fields model show relatively little difference between the temperature fields predicted by the two models. Significant differences are observed, however, between the corresponding flow and electromagnetic fields. The new model offers an effective means of accounting for variations in the coil geometry on the flow and temperature fields in the discharge and for achieving a better representation of the electromagnetic fields under higher frequency conditions (f>10 MHz).

Key Words

Modellinginduction plasmasflow and temperature fieldtwo-dimensional electromagnetic fields

Copyright information

© Plenum Publishing Corporation 1989