Article

International Journal of Infrared and Millimeter Waves

, Volume 5, Issue 3, pp 245-278

Far-infrared microbolometer detectors

  • D. P. NeikirkAffiliated withDivision of Engineering and Applied Science, California Institute of Technology
  • , Wayne W. LamAffiliated withDivision of Engineering and Applied Science, California Institute of Technology
  • , D. B. RutledgeAffiliated withDivision of Engineering and Applied Science, California Institute of Technology

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Abstract

The bismuth microbolometer is a simple, easily made detector suitable for use throughout the far-infrared, which has been integrated with a variety of planar antennas. The general thermal properties of these devices and some of the constraints on bolometer materials are discussed. The fabrication and performance of several different types of microbolometers and microthermocouples are described.

Key words

bolometers far-infrared detectors integrated detectors