International Journal of Infrared and Millimeter Waves

, Volume 5, Issue 3, pp 245–278

Far-infrared microbolometer detectors

  • D. P. Neikirk
  • Wayne W. Lam
  • D. B. Rutledge
Article

DOI: 10.1007/BF01009656

Cite this article as:
Neikirk, D.P., Lam, W.W. & Rutledge, D.B. Int J Infrared Milli Waves (1984) 5: 245. doi:10.1007/BF01009656

Abstract

The bismuth microbolometer is a simple, easily made detector suitable for use throughout the far-infrared, which has been integrated with a variety of planar antennas. The general thermal properties of these devices and some of the constraints on bolometer materials are discussed. The fabrication and performance of several different types of microbolometers and microthermocouples are described.

Key words

bolometersfar-infrared detectorsintegrated detectors

Copyright information

© Plenum Publishing Corporation 1984

Authors and Affiliations

  • D. P. Neikirk
    • 1
  • Wayne W. Lam
    • 1
  • D. B. Rutledge
    • 1
  1. 1.Division of Engineering and Applied ScienceCalifornia Institute of TechnologyPasadena
  2. 2.Dept. of Electrical EngineeringUniversity of Texas at AustinAustin