Applied Physics B

, Volume 42, Issue 2, pp 67–72

Tuning ranges of KrF and ArF excimer laser amplifiers and of associated vacuum ultraviolet anti-Stokes Raman lines

  • H. F. Döbele
  • M. Hörl
  • M. Röwekamp
Contributed Papers

DOI: 10.1007/BF00694812

Cite this article as:
Döbele, H.F., Hörl, M. & Röwekamp, M. Appl. Phys. B (1987) 42: 67. doi:10.1007/BF00694812

Abstract

Measurements of tuning ranges for narrow-bandwidth (\(\Delta \tilde v \approx 0.3cm^{ - 1}\)) radiation amplified in KrF and ArF laser amplifiers are reported. Generation of high-order anti-Stokes Raman lines in H2 down to 116 nm is described as well as measurements of the corresponding tuning ranges. Generation of rotational side-bands opens the possibility to tune most of the vacuum-ultraviolet (vuv) lines over intervals in excess of 1400 cm−1. Absolute values of the power measured for the various vuv lines are communicated.

PACS

42.65C42.60.B

Copyright information

© Springer-Verlag 1987

Authors and Affiliations

  • H. F. Döbele
    • 1
  • M. Hörl
    • 1
  • M. Röwekamp
    • 1
  1. 1.Fachbereich PhysikUniversität-GHEssen 1Fed. Rep. Germany