Applied Physics A

, Volume 45, Issue 4, pp 325–335

Laser synthesis of metal silicides


  • E. D'Anna
    • Department of PhysicsUniversity of Lecce
  • G. Leggieri
    • Department of PhysicsUniversity of Lecce
  • A. Luches
    • Department of PhysicsUniversity of Lecce
Laser-Induced Chemical Processing of Materials

DOI: 10.1007/BF00617939

Cite this article as:
D'Anna, E., Leggieri, G. & Luches, A. Appl. Phys. A (1988) 45: 325. doi:10.1007/BF00617939


The relevant results obtained in the field of laser synthesis of metal silicides are reviewed. Particular emphasis is given to the work using a pulsed laser in the nanosecond regime and to the results obtained in our laboratory. Formation of stable and metastable compounds, their structure and the surface morphology of the irradiated materials are discussed. The reaction kinetics is investigated through a comparison of the experimental results with the heat flow and temperature calculations.


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© Springer-Verlag 1988