, Volume 10, Issue 3, pp 399-405

SEM investigations of iron surface ion erosion as a function of specimen temperature and incidence angle

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Abstract

Ion bombardment of iron surfaces produced an ion eroded surface microtopography strongly dependent on the incidence angle and specimen temperature. For bombardment temperatures exceeding the self-diffusion temperature, T d, a microstructural smoothing process due to the thermally activated diffusion effects, assisted by ion bombardment, can be observed by SEM. The role of migrational processes which should be taken into account for a correct interpretation of the final surface topography formed by “hot sputtering”, was also considered.