Journal of Materials Science

, Volume 12, Issue 7, pp 1411–1415

Time-dependent properties of organic thin films deposited by glow discharge

  • D. Ristow
Papers

DOI: 10.1007/BF00540855

Cite this article as:
Ristow, D. J Mater Sci (1977) 12: 1411. doi:10.1007/BF00540855

Abstract

Sample capacitors were constructed with dielectrics obtained from completely fluorinated carbons which were polymerized in a plasma glow discharge. The rate of degradation of the capacitor properties depends on the size of the monomer molecule selected, the discharge frequency used during the deposition of the film, the vacuum anneal immediately after deposition, the temperature, the applied electric field, and the air or vacuum environment during life tests. The diversity of the results is explained by plasma acitvation of the carbon-carbon bond in the monomers and the formation of the films from the radicals thus produced.

Copyright information

© Chapman and Hall Ltd. 1977

Authors and Affiliations

  • D. Ristow
    • 1
  1. 1.Siemens AGMünchenWest Germany