Ozone is generated in pure oxygen (p≦5 kPa), synthetic air (p≦7 kPa) and oxygen-argon mixtures (p≦3 kPa) by irradiation of these gases with the VUV light of a repetitively pulsed (fL≦15 Hz) F2-laser at λ=157.6 nm with maximum about 4 mJ/pulse. An absorption photometer measurement operating at 253.7 nm (Hg line) determines the ozone concentration as a function of oxygen and/or additive gas pressure, the repetition frequency of the laser and the wall temperature of the reaction chamber. The temporal development of the ozone concentration as a function of these parameters is calculated by means of rate equations for the species O(3P), O2(X3∑g−), O3(1A1), O(1D), O2(a1Δg), O2(b1∑g+) and vibrationally excited O3*(1A1) and the photon distribution. The maximum concentration of O3 in the sealed-off chamber reaches 1.6% in pure O2, 4.1% in air and 1.2% in a 1:5 O2-Ar mixture at 3 kPa. The annihilation of O3 by the wall and temperature dependent volume processes (300 K≦T≦395 K) is studied and the experimental and theoretical results are compared.