Abstract
Downsizing mechanical systems requires the consideration of technological environment and restrictions. Nominal dimensions can be miniaturized, but shape and material deviations cannot be scaled down in the same way. In design these effects have to be considered and thus analyzed and evaluated in the very early activities. Simulation and test methods have to be adapted to the special characteristics of microtechnology. The present paper provides a strategy to validate micromechanical systems by means of virtual and physical testing. A standard test approach in macroscopic gear metrology, the tangential composite inspection, is used as validation tool for both test approaches. The results are very promising and show a good correlation between both miniaturized tests procedures.
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Acknowledgments
We are grateful for the support provided by the German Research Foundation (DFG) within the collaborative research center (SFB) 499 “Development, production and quality assurance of primary shaped micro components from metallic and ceramic materials”.
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Albers, A., Börsting, P., Deigendesch, T. et al. Micro gear validation: improving the correlation between virtual and physical testing. Microsyst Technol 16, 1529–1535 (2010). https://doi.org/10.1007/s00542-009-0997-9
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DOI: https://doi.org/10.1007/s00542-009-0997-9