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Nanostructuring of thin films by ns pulsed laser interference

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Abstract

We show that nanosecond pulsed laser interference can be used to structure surfaces on a nanoscale. With this method, we are able to create hollow structures on various thin films like Ta, Ni, Au, Cu, Co, and NiTi. We find that the structuring mechanism is related to the mechanical effect of thermal expansion upon melting. To corroborate this model, we study materials with an abnormal behavior at the melting point like Si, Ge, or Bi, as they contract upon melting.

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Authors and Affiliations

  1. University of Konstanz, Fach 676, 78457, Konstanz, Germany

    S. Riedel, M. Schmotz, P. Leiderer & J. Boneberg

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  1. S. Riedel
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  2. M. Schmotz
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  3. P. Leiderer
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  4. J. Boneberg
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Correspondence to S. Riedel.

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Riedel, S., Schmotz, M., Leiderer, P. et al. Nanostructuring of thin films by ns pulsed laser interference. Appl. Phys. A 101, 309–312 (2010). https://doi.org/10.1007/s00339-010-5822-x

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  • DOI: https://doi.org/10.1007/s00339-010-5822-x

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