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Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

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Abstract

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications.

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Authors and Affiliations

  1. Laser-Based Manufacturing Laboratory, Department of Mechanical & Aerospace Engineering, University of Missouri-Rolla, 1870 Miner Circle, Rolla, MO, 65409, USA

    Y. Cheng & H.L. Tsai

  2. Laser Technology Laboratory, RIKEN – The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama, 351-0198, Japan

    K. Sugioka & K. Midorikawa

Authors
  1. Y. Cheng
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  2. H.L. Tsai
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  3. K. Sugioka
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  4. K. Midorikawa
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Corresponding author

Correspondence to H.L. Tsai.

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PACS

42.62.-b; 81.05.Kf; 82.50.Pt

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Cheng, Y., Tsai, H., Sugioka, K. et al. Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining. Appl. Phys. A 85, 11–14 (2006). https://doi.org/10.1007/s00339-006-3672-3

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  • DOI: https://doi.org/10.1007/s00339-006-3672-3

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