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Bump formation on a glass surface with a transparent coating using femtosecond laser processing

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Abstract

The morphology of a glass surface having a transparent coating processed with focused femtosecond laser pulses is investigated. The transparent coating is formed of poly-methyl methacrylate (PMMA). When the glass was coated with a PMMA film with a thickness of 2.8 μm, bumps were formed over a wide range of axial focus positions. The same laser pulse energy produced cavities when processing bare glass with no coating. The bumps were formed as a result of suppressing material emission from the glass surface by a shielding effect of plasma generated by ablation of the PMMA film and by physical blocking of the PMMA film. A thinner film with a thickness of 0.7 μm produced a reduced shielding effect, forming an exploded bump with a small pit at its center and debris around the periphery.

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Correspondence to Y. Hayasaki.

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44.10.+i; 61.80.Ba; 79.20.Ds

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Kawamura, D., Takita, A., Hayasaki, Y. et al. Bump formation on a glass surface with a transparent coating using femtosecond laser processing. Appl. Phys. A 85, 39–43 (2006). https://doi.org/10.1007/s00339-006-3648-3

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  • DOI: https://doi.org/10.1007/s00339-006-3648-3

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