Skip to main content
SpringerLink
Log in

Single-step patterning and the fabrication of contact masks by laser-induced forward transfer

  • Rapid communication
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Laser-induced forward transfer (LIFT) of Au evaporated as a thin film on regular two-dimensional lattices of microspheres has been employed for both the generation of arrays of Au dots on different substrates and of well-defined apertures on the surface of the microspheres. The latter system can be used for high contrast surface patterning. Similar experiments have been performed by using a thin metal foil in close contact to the microspheres and the substrate instead of an evaporated film.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. D. Bäuerle: Laser Processing and Chemistry, 3rd ed. (Springer, Berlin, 2000).

  2. J. Bohandy, B.F. Kim, F.J. Adrian: J. Appl. Phys. 60, 1538 (1986)

    Article  Google Scholar 

  3. E. Fogarassy: SPIE Proc. 1394, 169 (1990)

    Google Scholar 

  4. Z. Toth, T. Szörenyi, A.L. Toth: Appl. Surf. Sci. 69, 317 (1993)

    Article  MATH  Google Scholar 

  5. I. Zergioti, S. Mailis, N.A. Vainos, C. Fotakis, S. Chen, C.P. Grigoropoulos: Appl. Surf. Sci. 127–129, 601 (1998)

    Google Scholar 

  6. R. Denk, K. Piglmayer, D. Bäuerle: Appl. Phys. A 74, 825 (2002)

    Article  Google Scholar 

  7. K. Piglmayer, R. Denk, D. Bäuerle: Appl. Phys. Lett. 80, 4693 (2002)

    Article  Google Scholar 

  8. G. Wysocki, R. Denk, K. Piglmayer, N. Arnold, D. Bäuerle: Appl. Phys. Lett. 82, 692 (2003)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Angewandte Physik, Johannes-Kepler-Universität, Altenbergerstrasse 69, 4040, Linz, Austria

    L. Landström, J. Klimstein, G. Schrems, K. Piglmayer & D. Bäuerle

Authors
  1. L. Landström
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Klimstein
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. G. Schrems
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. K. Piglmayer
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. D. Bäuerle
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to D. Bäuerle.

Additional information

PACS

42.60.Eb; 42.78.-b; 81.60.-j

Rights and permissions

Reprints and permissions

About this article

Cite this article

Landström, L., Klimstein, J., Schrems, G. et al. Single-step patterning and the fabrication of contact masks by laser-induced forward transfer. Appl Phys A 78, 537–538 (2004). https://doi.org/10.1007/s00339-003-2375-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-003-2375-2

Keywords

Search

Navigation