Skip to main content
SpringerLink
Log in

Antireflective structures in CdTe and CdZnTe surfaces by ECR plasma etching

  • Special Issue Paper
  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

A rigorous coupled-wave analysis procedure has been used to design structures which can be embedded in Cd(Zn)Te surfaces to make them antireflective in the 8–14 m spectral region. Gray scale lithography was used to produce these patterns in photoresist layers. High fidelity transfer of patterns into Cd(Zn)Te surfaces was accomplished by utilizing an electron cyclotron resonance plasma with etch selectivity values in the range of 6.7–13.3. Transmission values at patterned surfaces were measured to be as high as 99.3%.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. T.K. Gaylord, W.E. Baird, and M.G. Moharam,Appl. Opt. 25, 4562 (1986).

    CAS  Google Scholar 

  2. R. Enger and S.K. Case,Appl. Opt. 22, 3220 (1983).

    CAS  Google Scholar 

  3. D.H. Raguin and G.M. Morris,Appl. Opt. 32, 1154 (1993).

    CAS  Google Scholar 

  4. R.E. Smith, M.E. Warren, J. Wendt, and G. Vawter,Opt. Lett. 21, 1201 (1996).

    Article  CAS  Google Scholar 

  5. E.B. Grann, M.G. Moharam, and D.A. Pommet,JOSAA 11, 2695 (1994).

    Google Scholar 

  6. H. Dammann,Appl. Opt. 17, 2273 (1978).

    Google Scholar 

  7. GSOLVER software (Grating Solver Development Company, P.O. Box 353, Allen, TEXAS 75013).

  8. J.D. Benson, J. Johnson, L. Almeida, M. Martinka, J.M. Turner, J.Y. Johnson, P. Boyd, D. Advena, and J.H. Dinan,Control of the Aspect Ratio in Dry Etched II–VI Compounds (Toledo, OH: Int. REST Investigators Soc., 1998).

    Google Scholar 

  9. R.C. Keller, H. Zimmerman, M. Seelmann-Eggebert, and H.J. Richter,J. Electron. Mater. 25, 534 (1997).

    Google Scholar 

  10. E.R. Schulte, C.A. Cockrum, and F.I. Gesswein,Proc. 1993 IRIS Infrared Mater. Specialty Group (Toledo, OH: Int. REST Investigators Soc., 1993).

    Google Scholar 

  11. N.K. Dhar, P.R. Boyd, M. Martinka, J.H. Dinan, L.A. Almeida, and N. Goldsman,J. Electron. Mater. 29, 748 (2000)

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. E-OIR Measurements, Inc., Spotsylvania, VA

    A. J. Stoltz

  2. SY Technology, Inc., Huntsville, AL

    M. R. Banish & D. B. Chenault

  3. Night Vision and Electronic Sensors Directorate, Ft. Belvoir, VA

    J. H. Dinan & J. D. Benson

  4. MEMS Optical LLC, Huntsville, AL

    D. R. Brown

  5. Army Research Laboratory, Adelphi, MD

    P. R. Boyd

Authors
  1. A. J. Stoltz
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. R. Banish
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. J. H. Dinan
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J. D. Benson
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. D. R. Brown
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. D. B. Chenault
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. P. R. Boyd
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Stoltz, A.J., Banish, M.R., Dinan, J.H. et al. Antireflective structures in CdTe and CdZnTe surfaces by ECR plasma etching. J. Electron. Mater. 30, 733–737 (2001). https://doi.org/10.1007/BF02665864

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02665864

Key words

Search

Navigation