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Multi-layer epitaxially grown silicon impatt diodes at millimeter-wave frequencies

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Abstract

Complementary (N+PP+) and double-drift (N+NPP+) silicon IMPATT diodes were prepared and investigated as oscillators in the millimeter-wave frequency region of 50 to 70 GHz. All the diodes were fabricated from multi-layer epitaxially grown silicon structures. A maximum CW output power level of 198 mW at 62.9 GHz and a maximum conversion efficiency of 7.3% have been measured for the complementary diodes. The double-drift IMPATT diodes have a maximum CW output power of 400 mW at 56.3 GHz and a maximum conversion efficiency of 8.5%.

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Wen, C.P., Chiang, Y.S. & Denlinger, E.J. Multi-layer epitaxially grown silicon impatt diodes at millimeter-wave frequencies. J. Electron. Mater. 4, 119–129 (1975). https://doi.org/10.1007/BF02657840

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  • DOI: https://doi.org/10.1007/BF02657840

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