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Tuning ranges of KrF and ArF excimer laser amplifiers and of associated vacuum ultraviolet anti-Stokes Raman lines

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Abstract

Measurements of tuning ranges for narrow-bandwidth (\(\Delta \tilde v \approx 0.3cm^{ - 1}\)) radiation amplified in KrF and ArF laser amplifiers are reported. Generation of high-order anti-Stokes Raman lines in H2 down to 116 nm is described as well as measurements of the corresponding tuning ranges. Generation of rotational side-bands opens the possibility to tune most of the vacuum-ultraviolet (vuv) lines over intervals in excess of 1400 cm−1. Absolute values of the power measured for the various vuv lines are communicated.

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Döbele, H.F., Hörl, M. & Röwekamp, M. Tuning ranges of KrF and ArF excimer laser amplifiers and of associated vacuum ultraviolet anti-Stokes Raman lines. Appl. Phys. B 42, 67–72 (1987). https://doi.org/10.1007/BF00694812

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  • DOI: https://doi.org/10.1007/BF00694812

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