Skip to main content
Log in

Cadmium deposition on transparent substrates by laser induced dissociation of Cd(CH3)2 at visible wavelengths

  • Contributed Papers
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

The laser initiated formation of Cd-deposits from dimethylcadmium (DMCd) on quartz substrates has been investigated at various wavelengths between 337 and 676 nm. In this range substrate and DMCd are both transparent. The deposition mechanism is initiated by multiphoton dissociation of DMCd molecules adsorbed at the glass substrate and continues by pyrolysis of DMCd molecules at the laser-heated metallic deposit. Metal structures with a resolution below 1 μm have been obtained.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. C.P. Christensen, K.M. Lakin: Appl. Phys. Lett.32, 254–256 (1978)

    Google Scholar 

  2. S.D. Allen, M. Bass: J. Vac. Sci. Technol.16, 431 (1979)

    Google Scholar 

  3. M.W. Jones, L.J. Rigby, D. Ryan: Nature212, 177 (1966)

    Google Scholar 

  4. T.F. Deutsch, D.J. Ehrlich, R.M. Osgood, Jr.: Appl. Phys. Lett.35, 175–177 (1979)

    Google Scholar 

  5. Y. Rytz-Froidevaux, R.P. Salathé, H.H. Gilgen: Phys. Lett.84A, 216–218 (1981)

    Google Scholar 

  6. R.P. Salathé, Y. Rytz-Froidevaux, H.H. Gilgen, H.P. Weber: “Visible Light Induced Deposition of Cd on Transparent Substrates” paper presented at the Workshop on the Interaction of Laser Radiation with Surfaces for Application to Microelectronics, May 4–5, 1981, at M.I.T. Stratton Student Center, Cambridge, Massachussets

  7. D.J. Ehrlich, R.M. Osgood, Jr., T.F. Deutsch: Appl. Phys. Lett.38, 946–948 (1981)

    Google Scholar 

  8. D.J. Ehrlich, R.M. Osgood, Jr., Chem. Phys. Lett.79, 381–388 (1981)

    Google Scholar 

  9. C.H. Nicholls, P.A. Leermarkers: Adv. Photochem.8, 315–336, (1971)

    Google Scholar 

  10. J.A. Kerr: Chem. Rev.66, 465–500 (1966)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Rytz-Froidevaux, Y., Salathé, R.P., Gilgen, H.H. et al. Cadmium deposition on transparent substrates by laser induced dissociation of Cd(CH3)2 at visible wavelengths. Appl. Phys. A 27, 133–138 (1982). https://doi.org/10.1007/BF00616663

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00616663

PACS

Navigation