Authors:
- Plasma technologies are inevitable for the microelectronic research and industry – this book explains how!
- First English edition of the successful, corresponding German book
- Includes supplementary material: sn.pub/extras
Buy it now
Buying options
Tax calculation will be finalised at checkout
Other ways to access
This is a preview of subscription content, log in via an institution to check for access.
Table of contents (14 chapters)
-
Front Matter
-
Back Matter
About this book
Authors and Affiliations
-
FB 06 Feinwerk- und Mikrotechnik, Hochschule München, München, Germany
Gerhard Franz
Bibliographic Information
Book Title: Low Pressure Plasmas and Microstructuring Technology
Authors: Gerhard Franz
DOI: https://doi.org/10.1007/978-3-540-85849-2
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2009
Hardcover ISBN: 978-3-540-85848-5Published: 30 April 2009
Softcover ISBN: 978-3-642-09939-7Published: 19 October 2010
eBook ISBN: 978-3-540-85849-2Published: 09 April 2009
Edition Number: 1
Number of Pages: XXIV, 732
Number of Illustrations: 422 b/w illustrations
Topics: Optical and Electronic Materials, Electronics and Microelectronics, Instrumentation, Surfaces and Interfaces, Thin Films, Atomic/Molecular Structure and Spectra