Abstract
Epitaxial graphene layers are produced with the aid of thermal destruction of the surface of a semi-insulating SiC substrate. Raman spectroscopy and atomic-force microscopy are employed in the study of the film homogeneity. A prototype of the gas sensor based on the films is fabricated. The device is sensitive to the NO2 molecules at a level of 5 ppb (five particles per billion). A possibility of the industrial application of the sensor is discussed.
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Original Russian Text © A.A. Lebedev, S.P. Lebedev, S.N. Novikov, V.Yu. Davydov, A.N. Smirnov, D.P. Litvin, Yu.N. Makarov, V.S. Levitskii, 2016, published in Zhurnal Tekhnicheskoi Fiziki, 2016, Vol. 86, No. 3, pp. 135–139.
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Lebedev, A.A., Lebedev, S.P., Novikov, S.N. et al. Supersensitive graphene-based gas sensor. Tech. Phys. 61, 453–457 (2016). https://doi.org/10.1134/S1063784216030130
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DOI: https://doi.org/10.1134/S1063784216030130