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Radio-frequency capacitive discharge with flowing liquid electrodes at reduced gas pressures

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Abstract

Results are presented from experimental studies of the electrophysical and spectral characteristics of the low-temperature plasma of a radio-frequency capacitive discharge excited between two flowing liquid electrodes at gas pressures of 103−105 Pa. The plasma composition, the electron density, and the vibrational and rotational temperatures of gas molecules are estimated. The types and shapes of discharge are described, and the thermal and gas-hydrodynamic processes in the discharge zone are analyzed.

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Correspondence to Al. F. Gaisin.

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Original Russian Text © Al.F. Gaisin, E.E. Son, S.Yu. Petryakov, 2017, published in Fizika Plazmy, 2017, Vol. 43, No. 7, pp. 625–633.

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Gaisin, A.F., Son, E.E. & Petryakov, S.Y. Radio-frequency capacitive discharge with flowing liquid electrodes at reduced gas pressures. Plasma Phys. Rep. 43, 741–748 (2017). https://doi.org/10.1134/S1063780X17070054

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  • DOI: https://doi.org/10.1134/S1063780X17070054

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