Abstract
This study investigated the plasma polymerization process of butane in a closed radio frequency plasma reactor system. Optical emission spectra of the luminous gas phase specified the main plasma species in the plasma system are radical species of CH and H (Balmer series). In the early stage of the butane plasma polymerization process, dissociation glow (cathode glow) was the primary glow with much higher deposition rate observed due to the availability of CH radicals in the system. In the late stage of the plasma process, in contrast, negative glow dominated and plasma deposition rate significantly decreased and eventually stopped due to exhaustion of the film forming CH radicals as confirmed by OES spectra of the luminous plasma phase. The results indicate that dissociation glow in the discharge creates hydrocarbon species for plasma polymeric film deposition.
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Huang, YC., Yu, Q. & Huang, C. Influence of the Luminous Gas Phase into Butane Plasma Polymerization in a Closed Reactor System. High Energy Chem 56, 122–130 (2022). https://doi.org/10.1134/S0018143922020059
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DOI: https://doi.org/10.1134/S0018143922020059