Abstract
The effect of the state of stress at a film-substrate interface on the elastic deformation of Ti films is studied during alternating bending. The Al substrate compliance is shown to cause coherent deformation of the film-substrate system, resulting in the corrugation of a Ti film and the appearance of a wavelike film-substrate interface. Fatigue tests lead to the formation of a periodic distribution of normal and tangential stresses along the interface, and this distribution favors periodic film corrugation. The corrugation of a Ti film on a Ti substrate occurs randomly in local film separation areas and is caused by defects accumulated at the interface.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
MEMS: Applications, Ed. by M. Gad-el-Hak (CRC Taylor and Francis, Boca Raton, 2006).
MEMS: Introduction and Fundamentals, Ed. by M. Gad-el-Hak (CRC Taylor and Francis, Boca Raton, 2006).
W. Merlijn van Spengen, Microelectron. Reliab. 43, 1049 (2003).
W. D. Nix, Metall. Trans. A 20, 2217 (1989).
M. Ohring, The Materials Science of Thin Films (Academic, San Diego, 1992).
X.-Y. Gong and D. R. Clarke, Oxid. Met. 50, 355 (1998).
V. K. Tolpygo and D. R. Clarke, Acta Mater. 46, 5167 (1988).
A. R. Shugurov and A. V. Panin, Fiz. Mezomekh. 12, 21 (2009).
R. Schwaiger and O. Kraft, Acta Mater. 51, 195 (2003).
G. P. Zhang, C. A. Volkert, R. Schwaiger, R. Monig, and O. Kraft, Microelectron. Rel. 47, 2007 (2007).
W. Oliver and G. Pharr, J. Mater. Res. 7, 1564 (1992).
L. B. Freund and S. Suresh, Thin Film Materials: Stress, Defect Fomation and Surface Evolution (Cambridge Univ., Cambridge, 2003).
A. P. Babichev, N. A. Babushkina, A. M. Bratkovskii, M. E. Brodov, et al., in Handbook of Physical Quantities, Ed. by I. S. Grigoriev and E. Z. Meilikhov (Energoatomizdat, Moscow, 1991; CRC Press, Boca Raton, 1997).
L. D. Landau and E. M. Lifshitz, Course of Theoretical Physics, Vol. 7: Theory of Elasticity (Nauka, Moscow, 1987; Pergamon, New York, 1986).
R. Schwaiger and O. Kraft, Scr. Mater. 41, 823 (1999).
O. Kraft, R. Schwaiger, and P. Welner, Mater. Sci. Eng., A 319–321, 919 (2001).
H. G. Allen, Analysis and Design of Structural Sandwich Panels (Pergamon, New York, 1969).
S. H. Im and R. Huang, J. Appl. Mech. 72, 955 (2005).
M. Y. He, A. G. Evans, and J. W. Hutchinson, Acta Mater. 48, 2593 (2000).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text ©A.R. Shugurov, A.V. Panin, M.S. Kazachenok, 2010, published in Zhurnal Tekhnicheskoĭ Fiziki, 2010, Vol. 80, No. 11, pp. 35–40.
Rights and permissions
About this article
Cite this article
Shugurov, A.R., Panin, A.V. & Kazachenok, M.S. Elastic deformation of Ti films during alternating bending. Tech. Phys. 55, 1583–1587 (2010). https://doi.org/10.1134/S106378421011006X
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S106378421011006X