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Polycrystal diamond growth in a microwave plasma torch

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Abstract

Diamond films of different structures were deposited on quartz, WC-Co, and molybdenum substrates in a microwave plasma torch discharge in an argon-hydrogen-methane gas mixture in a sealed chamber at pressures close to atmospheric by using the chemical vapor deposition technique. Images of diamond polycrystal films and separate crystals, as well as results of Raman spectroscopy, are presented. The spectra of optical plasma radiation recorded during film deposition demonstrate the presence of intense Hα hydrogen and C2 radical bands known as Swan bands.

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Authors and Affiliations

  1. Prokhorov Institute of General Physics, Russian Academy of Sciences, ul. Vavilova 38, Moscow, 119991, Russia

    K. F. Sergeichev, N. A. Lukina, A. P. Bolshakov, V. G. Ralchenko, N. R. Arutyunyan & I. I. Vlasov

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  1. K. F. Sergeichev
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  2. N. A. Lukina
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  3. A. P. Bolshakov
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  4. V. G. Ralchenko
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  5. N. R. Arutyunyan
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  6. I. I. Vlasov
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Additional information

Original Russian Text © K.F. Sergeichev, N.A. Lukina, A.P. Bolshakov, V.G. Ralchenko, N.R. Arutyunyan, I.I. Vlasov, 2009, published in Prikladnaya Fizika, 2009, No. 6, pp. 107–113.

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Sergeichev, K.F., Lukina, N.A., Bolshakov, A.P. et al. Polycrystal diamond growth in a microwave plasma torch. Plasma Phys. Rep. 36, 1272–1277 (2010). https://doi.org/10.1134/S1063780X10130301

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  • DOI: https://doi.org/10.1134/S1063780X10130301

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