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Lamp-induced Forward Transfer: a New Approach for Deposition of Metal Films

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References

  1. J. Bohandy, B. F. Kim and F. J. Adrian, J. Appl. Phys. 60 (1986) 1538.

    Google Scholar 

  2. J. Bohandy, B. F. Kim, F. J. Adrian and A. N. Jette, ibid. 63 (1988) 1158.

    Google Scholar 

  3. R. J Baseman, A. Gupta, R. C. Sausa and C. Progler, in “Laser and particle-beam chemical processing for microelectronics”, edited by D. J. Ehrlich, G. S. Higashi and M. M. Oprysko (MRS Symp. Proc., Vol. 101, Pittsburgh, PA, 1988) p. 237.

  4. R. J. Baseman, N. M. Froberg, J. C. Andreshak and Z. Schlesinger, Appl. Phys. Lett. 56 (1990) 1412.

    Google Scholar 

  5. D. E. Alexander, G. S. Was and F. J. Mayer, J. Mater. Sci. 23 (1988) 2181.

    Google Scholar 

  6. J. A. Greer and T. E. Parker, in “Excimer beam applications”, edited by A. N. Pirri and B. P. Piwczyk (Proc. SPIE, Vol. 998, 1988) p. 113.

  7. F. J. Adrian, J. Bohandy, B. F. Kim, A. N. Jette and P. Thompson, J. Vac. Sci. Technol. B5 (1987) 1490.

    Google Scholar 

  8. Z. TÓth, Z. KÁntor, P. MogyorÓsi and T. SzÖrÉnyi, in “Laser-assisted processing II”, edited by L. D. Lande (Proc. SPIE, Vol. 1279, 1990) p. 150.

  9. P. MogyorÓsi, T. SzÖrÉnyi, K. Bali, Z. TÓth and I. Hevesi, Appl. Surf. Sci. 36 (1989) 157.

    Google Scholar 

  10. E. Fogarassy, C. Fuchs, F. Kerherve, G. Hauchecorne and J. Perriere, J. Mater. Res. 4 (1989) 1082.

    Google Scholar 

  11. D. BÄuerle, “Chemical processing with lasers”, Vol. 1, Springer Series in Materials Science (Springer, Berlin, 1986).

    Google Scholar 

  12. H. Esrom, J.-Y. Zhang, U. Kogelschatz and A. J. Pedraza, Appl. Surf. Sci. 86 (1995) 202.

    Google Scholar 

  13. B. Eliasson and U. Kogelschatz, Appl. Phys. B 52 (1991) 14.

    Google Scholar 

  14. E. Esrom and G. Wahl, Chemtronics 4 (1989) 216.

    Google Scholar 

  15. U. Kogelschatz, Pure Appl. Chem. 62 (1990) 1667.

    Google Scholar 

  16. B. Eliasson and U. Kogelschatz, Appl. Phys. B 46 (1988) 299.

    Google Scholar 

  17. J.-Y. Zhang, Thesis, University of Karlsruhe, Germany, 1993.

    Google Scholar 

  18. M. E. Gross, A. Appelbaum and P. K Gallagher, J. Appl. Phys. 61(4) (1987) 1628.

    Google Scholar 

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Zhang, JY., Boyd, I.W. & Esrom, H. Lamp-induced Forward Transfer: a New Approach for Deposition of Metal Films. Journal of Materials Science Letters 17, 2037–2040 (1998). https://doi.org/10.1023/A:1006637412355

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