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Formulation of Geometrically Nonlinear Numerical Model for Design of MEMS-Based Piezoresistive Pressure Sensor Operating in the Low-Pressure Range

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Abstract

Micro-fabricated pressure sensors are presently one of the most used micro-electromechanical system devices in the industry. Notably, they have gained popularity in medical, automotive and aeronautical applications. In the present work, a sensor operating in the low-pressure range with piezoresistive sensing and having a bossed-diaphragm structure has been designed. The structure has been characterized through numerical simulations using a custom-made software featuring geometrically nonlinear 2D elements. This simulation tool enables fast iterative design along with capturing key features related to the drift in sensitivity with respect to doping concentration and temperature. The simulation results show that the designed sensor has a full scale output of 2.2 µV/V/Pa, a linear error of 0.05% over its operating range of 5 kPa and a thermal sensitivity shift of − 0.1%/oC.

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Acknowledgements

This research was supported by the Ho Chi Minh City Department of Science and Technology of Vietnam, Contract Number: 12/2021/HĐ-QKHCN in 2021, March 24th.

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Authors and Affiliations

  1. Department of Information and Communications, 59 Ly Tu Trong Street, Ben Nghe Ward, District 1, Ho Chi Minh city, Vietnam

    Quoc Cuong Le

  2. The Research Laboratories of Saigon High-Tech-Park, Lot I3, N2 Street, Saigon Hi-Tech-Park, District 9, Ho Chi Minh city, Vietnam

    Tuan Khoa Nguyen, Xuan Thang Trinh, Vo Ke Thanh Ngo, Truong Huu Ly & Chi Cuong Nguyen

  3. The Industrial University of Hochiminh City, 12 Nguyen Van Bao, Ward 4, Go Vap District, Ho Chi Minh city, Vietnam

    Chi Cuong Nguyen

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Le, Q.C., Nguyen, T.K., Trinh, X.T. et al. Formulation of Geometrically Nonlinear Numerical Model for Design of MEMS-Based Piezoresistive Pressure Sensor Operating in the Low-Pressure Range. Sens Imaging 23, 32 (2022). https://doi.org/10.1007/s11220-022-00401-6

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