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Development of Magnetic Microcalorimeters for Gamma-Ray Spectroscopy

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Abstract

Integrating the SQUIDs and sensing coils of magnetic microcalorimeters onto the same die is a promising approach for maximizing flux coupling and signal/noise. However, new challenges in microfabrication must be overcome, because the underlying SQUID devices are sensitive to chemical attack and elevated processing temperatures. In this report, we describe development and details of a microfabrication process for integrated SQUID/sensor gamma-ray magnetic microcalorimeters with electroformed gold absorbers, starting from a modified version of the STAR Cryoelectronics “Delta 1000” Josephson Junction process.

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Notes

  1. Layer thicknesses and critical currents are given in order, moving upwards from the substrate.

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Acknowledgments

This work supported by the National Nuclear Security Administration and the Defense Threat Reduction Agency.

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Authors and Affiliations

  1. University of New Mexico, Albuquerque, NM, 87131, USA

    L. N. Le, R. Hummatov & S. T. P. Boyd

  2. STAR Cryoelectronics, Santa Fe, NM, 87508, USA

    J. A. Hall & R. C. Cantor

Authors
  1. L. N. Le
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  2. R. Hummatov
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  3. J. A. Hall
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  4. R. C. Cantor
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  5. S. T. P. Boyd
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Correspondence to L. N. Le.

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Le, L.N., Hummatov, R., Hall, J.A. et al. Development of Magnetic Microcalorimeters for Gamma-Ray Spectroscopy. J Low Temp Phys 184, 108–113 (2016). https://doi.org/10.1007/s10909-016-1478-z

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  • DOI: https://doi.org/10.1007/s10909-016-1478-z

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