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Insect-type MEMS microrobot with mountable bare chip IC of artificial neural networks

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Abstract

This paper discussed insect-type MEMS microrobot system which could locomote without using computer programs. Locomotion of the MEMS microrobot was generated using the analog circuit of artificial neural networks. We constructed the artificial neural networks as a bare chip integrated circuit (IC) which could mount on top of the MEMS microrobot. As a result, the MEMS microrobot system could perform the locomotion using constructed bare chip IC of artificial neural networks. The insect-type MEMS microrobot system was 0.079 g in weight and less than 5.0 mm in size. Only the power source was outside of the robot. In addition, we analyze the heat conduction of the shape memory alloy-type actuator. It was shown that the heat of shape memory alloy conducts to the mechanical parts of the MEMS microrobot; therefore, locomotion becomes slowly after 30 s. The slow locomotion was 2 mm/min. We constructed the less conduction shape memory alloy-type actuator. The locomotion speed of the insect-type MEMS microrobot using less conduction shape memory alloy-type actuator was 90.8 mm/min.

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Acknowledgments

This study was supported by Nihon University College of Science and Technology Project Research, Nihon University Academic Research Grant (Total research, “14-002”) and JSPS KAKENHI Grants 25420226. We appreciate the support. Specimen fabrication was supported by the Research Center for Micro Functional Devices of Nihon University. The VLSI chip in this study has been fabricated by Digian Technology, Inc. This work is supported by VLSI Design and Education Center (VDEC), the University of Tokyo in collaboration with Synopsys, Inc., Cadence Design Systems, Inc. and Mentor Graphics, Inc.

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Correspondence to Ken Saito.

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Saito, K., Sugita, K., Ishihara, Y. et al. Insect-type MEMS microrobot with mountable bare chip IC of artificial neural networks. Artif Life Robotics 22, 118–124 (2017). https://doi.org/10.1007/s10015-016-0324-3

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