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Mixed frequency excitation of an electrostatically actuated resonator

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Abstract

We investigate experimentally and theoretically the dynamics of a capacitive resonator under mixed frequency excitation of two AC harmonic signals. The resonator is composed of a proof mass suspended by two cantilever beams. Experimental measurements are conducted using a laser Doppler vibrometer to reveal the interesting dynamics of the system when subjected to two-source excitation. A nonlinear single-degree-of-freedom model is used for the theoretical investigation. The results reveal combination resonances of additive and subtractive type, which are shown to be promising to increase the bandwidth of the resonator near primary resonance frequency. Our results also demonstrate the ability to shift the combination resonances to much lower or much higher frequency ranges. We also demonstrate the dynamic pull-in instability under mixed frequency excitation.

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Acknowledgments

This work has been supported through KAUST research funds.

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Authors and Affiliations

  1. Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Saudi Arabia

    Abdallah Ramini & Mohammad I. Younis

  2. Department of Mechanical Engineering, State University of New York at Binghamton, Binghamton, NY, 13902, USA

    Alwathiqbellah I. Ibrahim & Mohammad I. Younis

Authors
  1. Abdallah Ramini
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  2. Alwathiqbellah I. Ibrahim
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  3. Mohammad I. Younis
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Correspondence to Abdallah Ramini.

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Mohammad I. Younis: The Principl Instructor funding this work

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Ramini, A., Ibrahim, A.I. & Younis, M.I. Mixed frequency excitation of an electrostatically actuated resonator. Microsyst Technol 22, 1967–1974 (2016). https://doi.org/10.1007/s00542-015-2546-z

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  • DOI: https://doi.org/10.1007/s00542-015-2546-z

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